JPS6240737Y2 - - Google Patents
Info
- Publication number
- JPS6240737Y2 JPS6240737Y2 JP14703978U JP14703978U JPS6240737Y2 JP S6240737 Y2 JPS6240737 Y2 JP S6240737Y2 JP 14703978 U JP14703978 U JP 14703978U JP 14703978 U JP14703978 U JP 14703978U JP S6240737 Y2 JPS6240737 Y2 JP S6240737Y2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- rigid member
- support
- porous rigid
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005498 polishing Methods 0.000 claims description 14
- 238000012856 packing Methods 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 239000006061 abrasive grain Substances 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14703978U JPS6240737Y2 (en]) | 1978-10-27 | 1978-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14703978U JPS6240737Y2 (en]) | 1978-10-27 | 1978-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5566743U JPS5566743U (en]) | 1980-05-08 |
| JPS6240737Y2 true JPS6240737Y2 (en]) | 1987-10-19 |
Family
ID=29128122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14703978U Expired JPS6240737Y2 (en]) | 1978-10-27 | 1978-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6240737Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11309638A (ja) * | 1998-04-28 | 1999-11-09 | Kyocera Corp | 真空吸着盤 |
-
1978
- 1978-10-27 JP JP14703978U patent/JPS6240737Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5566743U (en]) | 1980-05-08 |
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